MKS Solutions

Control Systems

Data Collection & Analysis

Flow Measurement, Control & Verification

Gas & Vapor Delivery

Heater Jackets for Stainless Steel Vacuum Products

Ionization, Static Control, Voltage Detection & Process Environment Monitoring

Leak Detection

Mass Spectrometry/Residual Gas Analysis

Ozone Products

Pressure/Vacuum Control

Pressure/Vacuum Measurement

RF & DC Power

Traps & Effluent Management

Stainless Steel Fittings

Valves

Disk Drive/Data Storage

Hard disk drive applications include computers, digital video recorders, digital audio players, personal digital assistants, digital cameras and video game consoles. Manufacturing of hard disk drives involves a complex series of process steps including plating, texturing, sputtering, cleaning, burnishing and packaging.

The key technical driver for this highly competitive industry is increased aerial density which requires smaller, more compacted patterns, which in turn require precision and control. Cost and yield are critical and protection from ESD damage of the tightly spaced patterns helps hard disk drive manufacturing companies meet their yield and efficiency goals.

MKS Instruments, Inc. has a broad portfolio of products to support the disk drive manufacturing market. These include power, pressure and flow control, tool and chamber controllers, as well as electrostatic discharge monitoring and control.

Applications Information:

EMI/ESD Pulse Ionizer Interference Issues

Keeping Ahead of Electrostatic Discharge

Measurement of the Effects of Ionizer Imbalance and Proximity to Ground in MR Head Handling

NanoPulse ESD/EMI/RFI Sensor - Separating ESD from all the Rest

Special Techniques for Detecting ESD Events in EMS Manufacturing Facilities - Finding ESD in Production Lines

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