MKS Solutions

Flow Measurement, Control & Verification

FTIR/NDIR Gas Analyzers

Gas & Vapor Delivery

Leak Detection

Mass Spectrometry/Residual Gas Analysis

Pressure/Vacuum Control

Pressure/Vacuum Measurement

Valves

Air & Gas Analysis

The market for air and gas analysis equipment spans a wide range of applications over a wide range of pressure and vacuum including ambient air monitoring for hazardous materials, homeland security, emissions monitoring for engine development, stack gas emissions monitoring, gas composition and purity monitoring for process control, and leak detection.

Speed, resolution, precision and material compatibility are essential for accurate analysis.

MKS Instruments, Inc. has a broad portfolio of products to support the air and gas analysis market. These include mass spectrometer based residual gas analyzers, FTIR based gas analyzers, control and analysis software, gas and vapor delivery products, vacuum and pressure measurement and control products as well as leak detectors.

Applications Information:

MKS Instruments Gas Analysis product overview

Catalysis, Combustion and Fuel Cell Applications

HPQ2-S for Process Monitoring on Large Area Coating Tools

Vision 1000-E for Process Monitoring on Large Area Coating Tools

FTIR Analysis of E85 Engines

Monitoring Hydrogen Reduction Process in TV and CRT Production

Real-time Gas Analysis for Quick, Accurate Catalyst Testing

Power Plant Emissions and SCR Monitoring with MultiGas 2030 Analyzers.

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