Type 1179, 2179, and 1479 Mass Flow Controllers
9-pin Type "D"
|
Pin
|
Description
|
| 1 |
Valve Open/Close |
| 2 |
Flow Signal Output |
| 3 |
+15 VDC |
| 4 |
Power Common |
| 5 |
-15 VDC |
| 6 |
Set Point Input |
| 7 |
Signal Common |
| 8 |
Signal Common |
| 9 |
MKS Test Point |
20-pin Edge Card
| 1 |
Chassis Gnd. |
| 2 |
Power Supply Common |
| 3 |
Flow Output (0 to +5 VDC) |
| 4 |
+ 15 VDC |
| 5 |
Optional Output |
| 6 |
No Connection |
| 7 |
Key |
| 8 |
No Connection |
| 9 |
No Connection |
| 10 |
Signal Common |
| A |
Set Point Input (0 to +5 VDC) |
| B |
Signal Common |
| C |
Signal Common |
| D |
Valve Open (TTL low) |
| E |
No Connection |
| F |
-15 VDC |
| H |
Key |
| J |
MKS Test Point |
| K |
No Connection |
| L |
Valve Close (TTL low) |
15-pin Type "D"
| 1 |
MKS Test Point |
| 2 |
Flow Signal Output |
| 3 |
Valve Close (TTL low) |
| 4 |
Valve Open (TTL low) |
| 5 |
Power Supply Common |
| 6 |
-15 VDC |
| 7 |
+15 VDC |
| 8 |
Set Point Input |
| 9 |
No Connection |
| 10 |
Optional Input |
| 11 |
Signal Common |
| 12 |
Signal Common |
| 13 to 14 |
No Connection |
| 15 |
Chassis Gnd. |
Note:
This information is subject to change without notice.
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