Vacuum Isolation Valves
Related Products: Throttle Pressure Control Valves
Related Products: Upstream Valves & Pressure Control Valves
Related Products: Custom-manufactured Vacuum Isolation Valves
The HPS® UHV Valve is lightweight and has a compact profile, fitting easily into vacuum systems where space is tight. UHV design limits outgassing and permeation for lower base system pressure.
HPS® UHV Valves are designed for use in ultra-high vacuum systems, for physical vapor deposition, high energy physics, mass spectrometry and applications requiring an ultraclean environment.
UHV Ultra-high Vacuum Valve data sheet
Vacuum Valve selection guide
Frequently Asked Questions about MKS HPS® Vacuum Isolation Valves
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Contact an Applications Specialist by sending an email to MKS Instruments, or call 303-449-9861.