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UHV Valves
Metal-sealed, Ultra-high Bellows-sealed Vacuum Valves


photo - UHV Ultra-high Vacuum Valve

MKS UHV Ultra-high Vacuum Valves are lightweight and have a compact profile, fitting easily into vacuum systems where space is tight. UHV design limits outgassing and permeation for lower base system pressure.

  • Limits outgassing and permeation for lower base system pressure
  • Compact design
  • Angle and inline body styles
  • Port diameters of 1, 1½, & 2 inches
  • ISO-KF or CF flanges

UHV Valves are designed for use in ultra-high vacuum systems, for physical vapor deposition, high energy physics, mass spectrometry and applications requiring an ultraclean environment.

UHV Ultra-high Vacuum Valve data sheet

Configurations:
 for online ordering & RFQs


Vacuum Valve selection guide

Vacuum Isolation Valve Frequently Asked Questions

SmartPhone version of this page (mksinst.mobi)


Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 303-449-9861.