An Innovative Optima Series Arc Suppression Enhancement
Features:
• 50 nsec Arc Detection
• <10A Peak Current
• <0.5 mJ Total Arc Energy at all power levels.
• 5-60kW output power
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Benefits:
• Less substrate damage for improved yield
• Internal module for same footprint
• Plug-in module for easy upgrade
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ArcKill™ is an optional plug-in module that fits inside the Optima® master unit. It is designed to extinguish arcs very quickly and deliver minimal energy into the arc, thereby limiting the arc’s damage potential.
Instead of using a primary current threshold as the arc detection mechanism, ArcKill™ uses the output waveforms. It can detect an arc in 50 nsec (at least 40 times faster than with the standard arc detection scheme), and resume running at setpoint <100msec after the arc detection. ArcKill™ delivers 400 times less arc energy than the previous industry standard, and 12 times less than the Pinnacle 12kw.
ArcKill™ can handle up to 5,000 arcs per second. If for some reason ArcKill™ fails to detect an arc, the energy delivered to the arc will be limited to the output energy of the OPT-100, still 10 times lower than the previous industry standard. In contrast to ENI arc suppression technology, when other arc suppression enhancement modules fail to detect an arc they actually add arc energy to the output of the associated power supply.
ArcKill™ has been demonstrated to be highly effective in very arc-sensitive processes such as reactive sputtering, and even in difficult processes such as the DC sputtering of Al2O3. ArcKill™ is currently available for output power levels up to 60kW.
Need a more detailed description of arcs, arc suppression and ENI’s ArcKill™? Visit “Sputtering Yield Enhancement with Arc Control” and “How to Measure an Arc”.
Need help?
Contact an Applications Specialist by sending an email to MKS ENI Products or call 585-427-8300.
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