Gas & Vapor Delivery

Vapor Delivery

Mass Flow Controllers


Pressure-based Mass Flow Controller

More about the 1640A Pressure-based Mass Flow Controller here

Full Scale Ranges For Implant Applications 2 sccm to 20 sccm (N2 equivalent)
Maximum Operating Inlet Pressure 5 psig
Minimum Operating Inlet Pressure (typical) below 10 torr
Overpressure Limit 45 psia
Control Range 5% to 100% of Full Scale (typical)
Flow Accuracy Gas/flow rate dependent
(including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)
Repeatability ± 0.2% of Full Scale
Resolution 0.1% of Full Scale
Temperature Coefficients
Zero <0.02% of Full Scale/°C
Span <0.2% of Rdg./°C
Warm-up Time <30 min (to within 0.2% of Full Scale of steady state performance)
Controller Settling Time to 100% of Full Scale <5 sec (typical per SEMI Guideline E17-91)
Normal Operating Temperature Range 0°C to 50°C
Input Voltage Required
Max. current at start-up (first 2 sec) ± 15 VDC (± 5%) @ 200 mA
Typical current at steady state ± 15 VDC (± 5%) @ 100 mA
Set Point Command Signal 0 to 5 VDC from <20K Ω
Output Signal 0 to 5 VDC into >10K Ω
Output Impedance <1 Ω
Connector Types 15-pin Type "D"
Wetted Materials
Standard wetted components 316L S.S., nickel, Inconel®
Valve seat only Kel-F®, Chemraz® or Kalrez® (gas/application dependent)
Leak Integrity
External (scc/sec He) <1 x 10-9
Through closed valve 1% of Full Scale (nitrogen) at 15 psig inlet to atmosphere
To assure no flow-through, a separate positive shut-off valve is required.
Fittings Compatible With Swagelok® 4 VCR®
Compliance Fully CE Compliant to EMC Directive 2004/108/EC
(when used with an overall metal shielded cable properly grounded at both ends)

Specifications are subject to change without notice.
VCR® is a registered trademark of Swagelok® Company.
Copyright MKS Instruments, Inc. unless noted otherwise.

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Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-975-2350.

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