Specifications
1640A
Pressure-based Mass Flow Controller
More about the 1640A Pressure-based Mass Flow Controller
here
|
1640A
|
|
Full Scale Ranges For Implant Applications
|
2 sccm to 20 sccm (N2 equivalent)
|
|
Maximum Operating Inlet Pressure
|
5 psig
|
|
Minimum Operating Inlet Pressure (typical)
|
below 10 torr
|
|
Overpressure Limit
|
45 psia
|
|
Control Range
|
5% to 100% of Full Scale (typical)
|
|
Flow Accuracy
|
Gas/flow rate dependent
(including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)
|
|
Repeatability
|
± 0.2% of Full Scale
|
|
Resolution
|
0.1% of Full Scale
|
|
Temperature Coefficients
|
|
Zero
|
<0.02% of Full Scale/°C
|
|
Span
|
<0.2% of Rdg./°C
|
|
Warm-up Time
|
<30 min (to within 0.2% of Full Scale of steady state performance)
|
|
Controller Settling Time to 100% of Full Scale
|
<5 sec (typical per SEMI Guideline E17-91)
|
|
Normal Operating Temperature Range
|
0°C to 50°C
|
|
Input Voltage Required
|
|
Max. current at start-up (first 2 sec)
|
± 15 VDC (± 5%) @ 200 mA
|
|
Typical current at steady state
|
± 15 VDC (± 5%) @ 100 mA
|
|
Set Point Command Signal
|
0 to 5 VDC from <20K Ω
|
|
Output Signal
|
0 to 5 VDC into >10K Ω
|
|
Output Impedance
|
<1 Ω
|
|
Connector Types
|
15-pin Type "D"
|
|
Wetted Materials
|
|
Standard wetted components
|
316L S.S., nickel, Inconel®
|
|
Valve seat only
|
Kel-F®, Chemraz® or Kalrez® (gas/application dependent)
|
|
Leak Integrity
|
|
External (scc/sec He)
|
<1 x 10-9
|
|
Through closed valve
|
1% of Full Scale (nitrogen) at 15 psig inlet to atmosphere
To assure no flow-through, a separate positive shut-off valve is required.
|
|
Fittings
|
Compatible With Swagelok® 4 VCR®
|
|
Compliance
|
Fully CE Compliant to EMC Directive 2004/108/EC
(when used with an overall metal shielded cable properly grounded at both ends)
|
Specifications are subject to change without notice.
VCR® is a registered trademark of Swagelok® Company.
Copyright MKS Instruments, Inc. unless noted otherwise.
mksinst.mobi - MKS Instruments for smart phones.
Add your email address to our mailing list.
© 2013 by MKS Instruments
mksinst™