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MKS San Jose Facilities

134 W. Rio Robles Drive
San Jose, CA 95134
Toll Free: 800-428-9401
Tel: 408-750-0300
Fax: 408-750-2990
Email: mks@mksinst.com

Directions from San Jose International Airport:

  1. Start out going Southeast on Airport Boulevard.
  2. Turn slight left at the fork to take the CA-87/Skyport DR ramp
  3. Merge onto Guadalupe Pkwy/CA-87 North towards US-101 North.
  4. Take Exit 9A toward North First Street.
  5. Turn Left onto North 1st Street and drive for about 3.8 miles.
  6. Turn Left onto Rio Robles Drive.
  7. Drive 0.2 miles and MKS Instruments will be on the left.

Directions from San Francisco International Airport:

  1. Head north and take the ramp to US-101 South. Keep left at the fork to continue toward US-101 South.
  2. Drive 25.6 miles on US-101 South.
  3. Take the exit onto CA-237 East toward Alviso/Milpitas.
  4. Drive 4.5 miles on CA-237 East.
  5. Take the North 1st Street exit .
  6. Turn left at North 1st St and drive 1.2 miles.
  7. Turn right at Rio Robles Drive and drive 1.9 miles. MKS Instruments will be on the left.

Download a map of MKS Instruments, San Jose, California from Yahoo! maps.

Directions to other MKS Instruments facilities here.


Need help?

Contact MKS by sending an email to MKS
or call 978-645-5500.

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