Innovation Leadership
For more than 45 years MKS has been building a portfolio of technologies essential for improved productivity. With more than 500 worldwide patents, over 250 degreed scientists and engineers, and a long history of "best product" awards, MKS has delivered innovative process solutions to the industries that we serve.
Through the acquisition and integration of select technologies, as well as through critical R&D efforts MKS not only continues to maintain market share leadership with a majority of products in our core market, but we have successfully extended our reach into new and emerging markets. By providing technology breadth, leadership and innovation we enable our customers to manage their processes and improve their productivity.
How is MKS technology improving performance and productivity?
In automotive emissions testing: The MultiGas™ 2030HS is the only high-speed FTIR gas analyzer to deliver fast, high-resolution monitoring of diesel, E85 and gasoline combustion exhaust with its ability to easily quantify over 20 combustion gases including NO, NO2, N2O, NOx and NH3.
In printing: Our customer increased press speeds by 18% while eliminating streaks with the MKS, ION ETAC electrostatic chill roll tacking system.
In solar cell film deposition: SurePower® RF power generators provide reliable solid-state power for superior film quality in thin-film solar cell processing equipment.
In Atomic Layer Deposition (ALD) processing: The unique Mole Delivery Device (MDD) is a versatile, pulsed precursor delivery system for liquid, gas or solid precursors and enables complete control over the temperature and pressure conditions in the delivery process, drastically reducing precursor waste.
In chamber clean: Fast and easy chamber clean is made possible with the ASTRON® reactive gas generator designed to clean undesired deposits from thin film deposition chamber walls while minimizing environmental impact and reducing wear and tear on process chambers.
In harsh environment biopharmaceutical processes: The easily removed Series 48 Filter Housing Heaters significantly reduce maintenance times and provide a cost-effective solution that replaces heat trace tape, steam jackets and supporting hardware.
In Fabless semiconductor processing: Through its patented Yield Mine DFM® automated decision making technology, Genesis® Fabless Edition yield management software has dramatically reduced the analysis time needed to find root causes of design for manufacturability issues in foundry production data.
In biopharm and Medical Sterilization processes: World leading Baratron® capacitance manometers provide a cost effective and process compatible solution for the ultimate in process pressure stability.
In injection molding for automotive and medical products: The SenseLink™ QM provides an entire solution for process monitoring and part quality prediction utilizing multivariate technology. For applications requiring 100% quality assurance, the MVA system for predictive QC in injection molding enables automatic part inspection while significantly reducing visual inspection costs.
In high energy physics: The MicroVision Plus-IP RGA with optional radiation resistant extender and bakeable adapter, delivers the fast monitoring and measuring performance required in the most demanding applications including the monitoring of storage and booster rings, linear accelerators and beam-lines at synchrotron radiation facilities.
In PVD and PECVD processing: ALTA MFCs' digital features, fast gas setting times, accuracy and multi gas and multi range capabilities provide increased performance while reducing operating and stocking costs in semi and solar cell manufacturing.
In vacuum loadlock chamber designs: The MKS HPS 901P transducer meets the toughest demands of loadlock operation, saving seconds during both pumpdown and vent-up; reducing particle contamination due to excessive flow and providing a single, reliable interface to the system.
These are just a few examples of MKS innovations in action. For more on our product applications, browse our application notes.
Download the MKS Instruments Corporate Overview brochure.
© 2009 by MKS Instruments