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Corporate Overview


MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity.

Technology for Productivity

Our products are derived from our core competencies in pressure measurement and control, flow measurement and control, gas and vapor delivery, gas composition analysis, residual gas analysis, leak detection, control and information technology, ozone generation and delivery, RF & DC power, reactive gas generation, and vacuum technology.

Market Leadership

Our primary served markets are manufacturers of capital equipment for semiconductor devices, and for other thin film applications including flat panel displays, solar cells, and data storage media. We also leverage our technology in other markets with advanced manufacturing applications including pharmaceutical and medical, energy generation, air and gas analysis, material processing and industry.

Global Support and a Commitment to Quality

To support our customers, MKS operates an extensive network of customer support and service centers around the world. These centers are staffed with applications experts who assist in selecting the most cost-effective solution to optimize production. Our customer support starts with our commitment to deliver innovative, error free products and our active pursuit of continuous improvement for our product designs, processes and management systems.