Warranty Terms

The following are MKS' warranty terms which are subject to and referenced in the MKS Terms and Conditions of Sale located at www.mksinst.com/Agreement:

Products

Warranty Period*

Calibration Products

1 year

Control Systems Products

1 year
(excluding embedded software which is warranted for 90 days)

Custom Vacuum Fabrication

1 year
(excluding heaters which are further described below)

Data Collection & Analysis

1 year
(excluding any standalone software products which are warranted pursuant to the applicable software license agreement)

Flow Measurement Control & Verification

1 year

FTIR/NDIR Gas Analyzers

1 year
(excluding NDIR Analyzers which are warranted for 2 years and any standalone software products which are warranted pursuant to the applicable software license agreement)

Gas & Vapor Delivery

1 year

HPS® Vacuum Gauges

1 year

Leak Detection

1 year

Mass Spectrometry/Residual Gas Analysis

1 year

Ozone Products

1 year

Plasma Sources

1 year

Pressure/Vacuum Control

1 year

Pressure/Vacuum Measurement

2 years
(excluding differential manometers, some specialized manometers, gauge tree assemblies, controllers, power supplies and cables which are all warranted for 1 year)

RF & DC Power

1 year
(excluding RF Amplifiers for MRI which are warranted for 18 months)

Traps & Effluent Management

1 year

Vacuum Components, Stainless Steel Fittings & Accessories

1 year

Valves

1 year

Wafer Analysis

1 year

Heater Jackets for Stainless Steel Vacuum Components:

Operating Temperature	Series 43, 45, 93, 95	Series 46, 96	Series 48, 98
150°c or less	1 Year	2 Year	2 Year
151-185°c	0 Months	1.5 Years	1.5 Years
185-200°c	0 Months	6 Months	6 Months
200°c +	0 Months	0 Months	0 Months

Series 45 PID controlled heaters with thermal fuse will have the same warranty, as Series 45 if maintained in the temperature ranges shown above. If the thermal fuse blows or the silicon deteriorates there is no warranty.

*All Warranty Periods begin on the date of shipment.

**The Warranty Periods for repaired or upgraded Products shall be 90 days from shipment of the repaired or upgraded product or the remaining portion of the original warranty, whichever is longer.

Need help?

Contact MKS Instruments by sending an email or call 800-227-8766 or 978-645-5500.

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