Produits

Calibration

Calibration Equipment

Flow Rate Calibrators

Tru-Flo® Mass Flow Verifier

GBROR® Gas Box Rate-of-Rise In Situ Flow Verifier

Pressure/Vacuum Rate Calibrators

PBTS1A Portable Baratron® Transfer Standard

PBMS2B Two-Channel Portable Baratron® Measurement System

PVS6E Portable Vacuum Calibration System

SRG-3 Spinning Rotor Gauge System

Voltage-monitoring Diagnostic Boards

Test Diagnostic Boards

Calibration Services

Control Systems

Intelligent Automation Solutions

cLogic - an Intelligent Automation Solution for Distributed Control Logic

Software Programmable Interlocks - an Intelligent Automation Solution for Safety I/O

SenseLink™ QM In-Line Quality Detection

Recipe Engine - Software for Intelligent Automation Solutions

Programmable Automation Controllers

ECM2 Ethernet Control Module and Platform

ECM Ethernet Control Module

RMU Remote Monitor Unit - Programmable Automation Controller (PAC) with Compact Networked I/O (Digital, Analog and Industrial Ethernet) for Ethernet Host Interface

I/O & Distributed Programmable I/O

Ethernet I/O Control Devices

RMU Remote Monitor Unit - Programmable Automation Controller (PAC) with Compact Networked I/O (Digital, Analog and Industrial Ethernet) for Ethernet Host Interface

MacroNode™ I/O Compact Networked I/O (Analog, Digital, and Programmable Interlocks), with cLogic Control Engine for DeviceNet and Industrial Ethernet Host Interfaces

MicroNode™ I/O Compact Networked I/O (Analog, Digital), with cLogic Control Engine for Fieldbus, DeviceNet™, Profibus, and Industrial Ethernet Host Interfaces

DeviceNet™ I/O Control Devices

MicroNode™ I/O Compact Networked I/O (Analog, Digital), with cLogic Control Engine for Fieldbus, DeviceNet™, Profibus, and Industrial Ethernet Host Interfaces

MacroNode™ I/O Compact Networked I/O (Analog, Digital, and Programmable Interlocks), with cLogic Control Engine for DeviceNet and Industrial Ethernet Host Interfaces

AS01391 DeviceNet Digital I/O for a VME card cage (formerly CDN391R)

AS01396 DeviceNet Analog I/O for a VME card cage (formerly CDN396R)

AS01394 DeviceNet Mixed Digitial and Analog I/O for a VME card cage (formerly CDN394R)

AS01491 DeviceNet Digital I/O for CompactPCI (formerly CDN491R)

AS01496 DeviceNet Analog I/O for CompactPCI (formerly CDN496R)

AS01494 DeviceNet Mixed Digitial and Analog I/O for CompactPCI (formerly CDN494R)

Profibus I/O Control Devices

MicroNode™ I/O Compact Networked I/O (Analog, Digital), with cLogic Control Engine for Fieldbus, DeviceNet™, Profibus, and Industrial Ethernet Host Interfaces

Gateways

ToolLink™ CDN466/CDN466-5 DeviceNet™ to RS232 Gateways

AS01366 RS232 to DeviceNet™ Gateway with Built-in Data Conversion and Multiple TX/RX Instance Support

AS01367 Serial Gateway, DeviceNet™ to RS422/485 Interface

AS02366 Profibus Serial Gateway, RS232 to Profibus Interface

CompactPCI (cPCI) Cards & Cages

CDCG-0760 3U CompactPCI (cPCI) Card Cage

SCOM-080X 3U and 6U Serial Communication Cards

AIAO-0700 3U Analog Input/Output Card

DIDO-0710 3U Digital Input/Output Card

PWRS-0720 3U Power Supply Card

AS01491 DeviceNet Digital I/O for CompactPCI (formerly CDN491R)

AS01494 DeviceNet Mixed Digitial and Analog I/O for CompactPCI (formerly CDN494R)

AS01496 DeviceNet Analog I/O for CompactPCI (formerly CDN496R)

Custom Vacuum Fabrication

Custom Vacuum Chambers

Custom-manufactured Pumpkits

Custom-manufactured Manifolds

Custom-manufactured Valves, Heaters, & Gauges

Custom-manufactured Process Piping

Gauge Manifold Kits

Custom-manufactured Effluent Management Subsystems

Custom-manufactured Tanks & Vessels

Data Collection & Analysis

Data Acquisition, Sensor Integration, Data Analysis

Blue Box Data Collection and Tool Interface

FabStat FDC Process Monitoring & VM Software from Umetrics

TOOLweb® RGA Process and Chamber Environment Monitor Software

Senselink ™ Data Gateway & Monitor: Analog & Digital Inputs and Serial Ports for Sensor Integration with Web-based GUI for Real-time Data Visualization and TOOLweb® Protocol Output

Ethernet I/O and Distributed Control

Multivariate Analysis Software

Umetrics

SenseLink™ QM In-Line Quality Detection

Fault Detection and Classification Software

FabStat FDC Process Monitoring & VM Software from Umetrics

Flow Measurement, Control & Verification

Mass Flow Controllers & Meters

Thermal-based Mass Flow Controllers & Meters

Analog, Thermal-based Mass Flow Controllers & Meters

Metal-sealed, Analog, Thermal-based Mass Flow Controllers & Meters

1479A Mass-Flo® Analog, Metal-Sealed Mass Flow Controller

179A Mass-Flo® Analog, Metal-sealed Mass Flow Meter

M330B Low Pressure Drop, Analog, Metal-sealed Mass Flow Controller

M330H/M330AH Analog, Metal-sealed, Heatable Mass Flow Controller for High Temperature Applications up to 150° C

Elastomer-sealed, Analog, Thermal-based Mass Flow Controllers & Meters

1179A Mass-Flo® Analog, Elastomer-sealed Mass Flow Controller

1559A High Flow, Analog, Elastomer-sealed Mass Flow Controller with a Normally Closed Valve

2179A Mass-Flo® Analog, General Purpose, Elastomer-sealed Mass Flow Controller with Shutoff Valve

M100B Mass-Flo® Economical, Analog, Elastomer-sealed Mass Flow Controller

M10MB Mass-Flo® Economical, Analog, Elastomer-sealed Mass Flow Meter

Digital, Thermal-based Mass Flow Controllers & Meters

Metal-sealed, Digital, Thermal-based Mass Flow Controllers & Meters

1480A ALTA™ Digital, Metal-sealed Mass Flow Controller

180A ALTA™ Digital, Metal-sealed Mass Flow Meter

MC20 ALTA™ Digital, Metal-sealed, High Flow Rate Mass Flow Controller

PFC-20 πMFC Low Pressure, Metal-sealed, Multi-gas, Multi-range, Digital Mass Flow Controller

P4B Multi-gas, Multi-range, Programmable, Metal-sealed, Digital Mass Flow Controller

PFC-50 πMFC Multi-gas, Metal-sealed, Multi-range, Digital Mass Flow Controller

PFC-60 πMFC Pressure-insensitive, Metal-sealed, Multi-gas, Digital Mass Flow Controller

PFC-80 πMFC Pressure-insensitive, Metal-sealed, Multi-gas, Multi-range, Digital Mass Flow Controller

Elastomer-sealed, Digital, Thermal-based Mass Flow Controllers & Meters

579 Digital, Elastomer-sealed, High Flow Rate Mass Flow Meter

1579 Digital, Elastomer-sealed, High Flow Rate Mass Flow Controller

Pressure-based Mass Flow Controllers

1150C Heated Pressure-based Mass Flow Controller, Using Viscous Flow Through a Choked Orifice

1152C Heated Pressure-based Mass Flow Controller, Using Viscous Flow Through a Laminar Flow Tube

1640A Pressure-based Mass Flow Controller

High-flow Mass Flow Controllers & Meters

1559A High Flow, Analog, Elastomer-sealed Mass Flow Controller with a Normally Closed Valve

MC20 ALTA™ Digital, Metal-sealed, High Flow Rate Mass Flow Controller

579 Digital, Elastomer-sealed, High Flow Rate Mass Flow Meter

1579 Digital, Elastomer-sealed, High Flow Rate Mass Flow Controller

In Situ Flow Verifiers

GBROR® Gas Box Rate-of-Rise In Situ Flow Verifier

GBR3B Tru-Flo® Mass Flow Verifier

HA-MFV, High Accuracy Mass Flow Verifier

Flow Ratio Controllers

DELTA™ II Flow Ratio Controller

DELTA™ II "Stretch Body" Flow Ratio Controller
Drop-in Replacement for the Original DELTA™ FRC

DELTA™ IV 4-zone Flow Ratio Controller

Flow Related Products

Pressure Control Products

Gas & Vapor Delivery Products

Control Valve Products

Flow Product Calibration

Flow Products Power Supplies, Readouts, & Accessories

179A Flow Meter Cables

1179A/2179A Cables

1479A Cables

1559A Cables

ALTA™ Flow Controller Cables and Accessories

M100, M10M, MC30 Flow Controller Cables

246C Single-Channel Power Supply/Readout

647C Four/Eight-channel Mass Flow and Pressure Programmer/Display

247D Four Channel Power Supply/Readout

246, 247 Power Supply/Display Cables

GBROR® Cables

PR4000B Digital Power Supply and Readout

Test Diagnostic Boards

FTIR/NDIR Gas Analyzers

FTIR Analyzers

AIRGARD® CWA/TIC Ambient Air Analyzer

AIRGARD®Plus CWA/TIC Ambient Air Analyzer with Ancillary Electrochemical Sensors

MultiGas™ 2030 FTIR Continuous Gas Analyzer

MultiGas™ 2030-HS High Speed (5 Hz) FTIR Gas Analyzer

MultiGas™ 2032 Purity FTIR Gas Analyzer

MultiGas™ 2030 CEM FTIR Gas Analyzer for Continuous Emissions Monitoring

2480 HS High Speed Sampling System for MultiGas™ 2030-HS FTIR Gas Analyzer

NDIR Analyzers

Process Sense™ NDIR Analyzer for Chamber Clean Endpoint Detection

Related Products: Mass Spectrometry/Residual Gas Analysis

Gas & Vapor Delivery

Vapor Delivery

1150C Heated Pressure-based Mass Flow Controller, Using Viscous Flow Through a Choked Orifice

1152C Heated Pressure-based Mass Flow Controller, Using Viscous Flow Through a Laminar Flow Tube

Mass Flow Controllers

Heater Jackets

Single Set Point Vacuum Component Heater Jackets

Single Set Point Heater Jackets with Low Temperature Alert (LTA)

Series 46 Single Set Point Heater Jackets with LTA for 1.5 inch diameter Straight Sections

Series 46 Single Set Point Heater Jackets with LTA for 2 inch diameter Straight Sections

Series 46 Single Set Point Heater Jackets with LTA for 3 inch diameter Straight Sections

Series 46 Single Set Point Heater Jackets with LTA for 4 inch diameter Straight Sections

Series 46 Single Set Point Heater Jackets with LTA for Elbows (45 degree, ISO flanges, standard modulus)

Series 46 Single Set Point Heater Jackets with LTA for Elbows (45 degree, weld stubs with tangents)

Series 46 Single Set Point Heater Jackets with LTA for Elbows (45 degree, weld stubs, standard modulus)

Series 46 Single Set Point Heater Jackets with LTA for Elbows (90 degree, ISO flanges, long radius)

Series 46 Single Set Point Heater Jackets with LTA for Elbows (90 degree, ISO flanges, standard modulus)

Series 46 Single Set Point Heater Jackets with LTA for Elbows (90 degree, weld stub with tangents)

Series 46 Single Set Point Heater Jackets with LTA for Elbows (90 degree, weld stub, standard modulus)

Series 46 Single Set Point Heater Jackets with LTA for ISO Flanged Bellows

Series 46 Single Set Point Heater Jackets with LTA for ISO Flanged Reducers

Series 46 Single Set Point Heater Jackets with LTA for Reducers with Weld Stubs

Series 46 Single Set Point Heater Jackets with LTA for ISO Flanged Tees

Series 46 Single Set Point Heater Jackets with LTA for Tees with Weld Stubs

Series 46 Single Set Point Heater Jackets with LTA for Thick Wall Hose

Series 46 Single Set Point Heater Jackets with LTA for Thin Wall Hose

Series 46 Heater Jacket Insulators

Series 46 Heater and LTA Accessories

Single Set Point Heater Jackets without Low Temperature Alert (LTA)

Series 46 Single Set Point Heater Jackets without LTA for 1.5 inch diameter Straight Sections

Series 46 Single Set Point Heater Jackets without LTA for 2 inch diameter Straight Sections

Series 46 Single Set Point Heater Jackets without LTA for 3 inch diameter Straight Sections

Series 46 Single Set Point Heater Jackets without LTA for 4 inch diameter Straight Sections

Series 46 Single Set Point Heater Jackets without LTA for Elbows (45 degree, ISO flanges, standard modulus)

Series 46 Single Set Point Heater Jackets without LTA for Elbows (45 degree, weld stubs with tangents)

Series 46 Single Set Point Heater Jackets without LTA for Elbows (45 degree, weld stubs, standard modulus)

Series 46 Single Set Point Heater Jackets without LTA for Elbows (90 degree, ISO flanges, long radius)

Series 46 Single Set Point Heater Jackets without LTA for Elbows (90 degree, ISO flanges, standard modulus)

Series 46 Single Set Point Heater Jackets without LTA for Elbows (90 degree, weld stub with tangents)

Series 46 Single Set Point Heater Jackets without LTA for Elbows (90 degree, weld stub, standard modulus)

Series 46 Single Set Point Heater Jackets without LTA for ISO Flanged Bellows

Series 46 Single Set Point Heater Jackets without LTA for ISO Flanged Reducers

Series 46 Single Set Point Heater Jackets without LTA for Reducers with Weld Stubs

Series 46 Single Set Point Heater Jackets without LTA for ISO Flanged Tees

Series 46 Single Set Point Heater Jackets without LTA for Tees with Weld Stubs

Series 46 Single Set Point Heater Jackets without LTA for Thick Wall Hose

Series 46 Single Set Point Heater Jackets without LTA for Thin Wall Hose

Series 46 Heater Jacket Insulators

Series 46 Heater and LTA Accessories

Adjustable Set Point Vacuum Component Heater Jackets

Adjustable Set Point, 120VAC Heater Jackets

Series 48 Adjustable Set Point, 120 VAC Heater Jackets for 1.5 inch diameter Straight Sections

Series 48 Adjustable Set Point, 120 VAC Heater Jackets for 2 inch diameter Straight Sections

Series 48 Adjustable Set Point, 120 VAC Heater Jackets for 3 inch diameter Straight Sections

Series 48 Adjustable Set Point, 120 VAC Heater Jackets for 4 inch diameter Straight Sections

Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Elbows (45 degree, ISO flanges, standard modulus)

Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Elbows (45 degree, weld stubs with tangents)

Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Elbows (45 degree, weld stubs, standard modulus)

Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Elbows (90 degree, ISO flanges, long radius)

Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Elbows (90 degree, ISO flanges, standard modulus)

Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Elbows (90 degree, weld stub with tangents)

Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Elbows (90 degree, weld stub, standard modulus)

Series 48 Adjustable Set Point, 120 VAC Heater Jackets for ISO Flanged Bellows

Series 48 Adjustable Set Point, 120 VAC Heater Jackets for ISO Flanged Reducers

Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Reducers with Weld Stubs

Series 48 Adjustable Set Point, 120 VAC Heater Jackets for ISO Flanged Tees

Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Tees with Weld Stubs

Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Thick Wall Hose

Series 48 Adjustable Set Point, 120 VAC Heater Jackets for Thin Wall Hose

Series 48 Heater Jacket Insulators

Series 48 Heater Accessories

Adjustable Set Point, 240 VAC Heater Jackets

Series 48 Adjustable Set Point, 240 VAC Heater Jackets for 1.5 inch diameter Straight Sections

Series 48 Adjustable Set Point, 240 VAC Heater Jackets for 2 inch diameter Straight Sections

Series 48 Adjustable Set Point, 240 VAC Heater Jackets for 3 inch diameter Straight Sections

Series 48 Adjustable Set Point, 240 VAC Heater Jackets for 4 inch diameter Straight Sections

Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Elbows (45 degree, ISO flanges, standard modulus)

Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Elbows (45 degree, weld stubs with tangents)

Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Elbows (45 degree, weld stubs, standard modulus)

Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Elbows (90 degree, ISO flanges, long radius)

Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Elbows (90 degree, ISO flanges, standard modulus)

Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Elbows (90 degree, weld stub with tangents)

Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Elbows (90 degree, weld stub, standard modulus)

Series 48 Adjustable Set Point, 240 VAC Heater Jackets for ISO Flanged Bellows

Series 48 Adjustable Set Point, 240 VAC Heater Jackets for ISO Flanged Reducers

Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Reducers with Weld Stubs

Series 48 Adjustable Set Point, 240 VAC Heater Jackets for ISO Flanged Tees

Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Tees with Weld Stubs

Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Thick Wall Hose

Series 48 Adjustable Set Point, 240 VAC Heater Jackets for Thin Wall Hose

Series 48 Heater Jacket Insulators

Series 48 Heater Accessories

Related Products: Vacuum Components, Stainless Steel Fittings

Related: Heated Vacuum Valves

Related: Filter Housing Heater Jackets

Leak Detection

Residual Gas Analyzers (RGA) for Leak Detection

Ozone Products

Dissolved Ozone Delivery Systems

LIQUOZON® Smart High Output 50 slm 3 channel Ozone Water Delivery System

LIQUOZON® Single Compact 20 slm Ozone Water Delivery System

LIQUOZON® LoopO3 10 slm Recirculating Ozone Water Delivery System

LIQUOZON® PrimO3 High Output Ozone Water Delivery System at Elevated Pressure

LIQUOZON® HeliO3 Recirculation Ozone Water Delivery System for Photovoltaic Applications

LIQUOZON® Stream High output 140 slm Ozone Water Delivery System

Ozone Gas Generators

SEMOZON® AX8400 High-concentration Ozone Generators

SEMOZON® AX8407 High-concentration, High Flow Ozone Generator

SEMOZON® AX8407C Compact Ozone Generator

Ozone Gas Delivery Systems

O3MEGA® AX8561 Rack Mounted Integrated Ozone Delivery Subsystem with Electronic Gas & Pressure Control

SEMOZON® AX8560 Rack Mounted Integrated Ozone Delivery Subsystem with Manual Gas & Pressure Control

SEMOZON® AX8550 2-Channel, Standalone Ozone Delivery Systems

SEMOZON® AX8555 4-channel, Standalone Ozone Delivery Systems

SEMOZON® AX8575 Multi-Channel Ozone Delivery System with In-rack Chiller

Ozone Sanitization

LIQUOZON® Ultra Ozone Sanitization of DI Water Loop and Storage Tank

EO3 Ozone Sanitation Generator & System

Accessories for Ozone Products

Ozone Gas Destruct (OVS)

Static Mixer

Plasma Sources

Plasma Sources for NF₃ and Fluorine-based Gases

ASTRON®i AX7670 Remote Plasma Source
(rated to 3.0 slm NF₃ flow rate)

ASTRON®ex AX7685 Remote Plasma Source
(rated to 6.0 slm NF₃ flow)

ASTRON®hf-s (split) AX7645 Remote Plasma Source
(rated to 15.0 slm NF₃ flow)

ASTRON®hf AX7640 Remote Plasma Source
(rated to 15.0 slm NF₃ flow)

ASTRON®hf+ AX7635 Remote Plasma Source
(rated to 22.0 slm NF₃ flow)

Plasma Sources for O₂, N₂, H₂, H₂O

Remote RF Plasma Sources

R*evolution® III AX7695 Remote RF Plasma Source

Microwave Plasma Sources

SmartPower® AX2518 1.8kW Microwave Plasma Source

SmartPower® AX2530 3kW Microwave Plasma Source

SmartPower® AX2560 6kW Microwave Plasma Source

Downstream Plasma Sources

AX7610-Q Chemical Downstream Plasma Source with a Quartz Tube

AX7610-S Chemical Downstream Plasma Source with a Saphire Tube

Pressure/Vacuum Control

Downstream Valves and Pressure Controllers

Control and Isolation Pendulum Valves

T3PIA Integrated High Speed Pendulum Valve and Controller

Butterfly/Throttle Valves with Integrated Controllers

T3Bi High Speed Exhaust Throttle Valve

153D "Smart" Exhaust Throttle Valve

683B "Smart" Exhaust Throttle Valve for DeviceNet™ Networks

Butterfly/Throttle Valves with Remote Controllers

Butterfly Valves

253B Exhaust Throttle Valve

653 B Exhaust Throttle Valve with High-Speed Motor/Gear Assembly

Remote Controllers for Butterfly/Throttle Valves

651C Digital/Analog Pressure Controller

1651C Displayless Digital Pressure Controller

Control & Isolation Poppet Valves with Remote Controllers

656A Throttling Isolation Valves

655A Throttling Isolation Valve Controller

Upstream Valves and Pressure Controllers

Upstream Valves

148J All-metal Control Valve

154A High Flow Control Valve

248A Flow Control Valve

Upstream Valve Controllers

1651C Displayless Digital Pressure Controller

651C Digital/Analog Pressure Controller

1249A Solenoid Control Valve Driver

250E Gas Inlet Pressure/Flow Control Module

Integrated Upstream Pressure Valves & Controllers

244E Pressure/Flow Controller

245 Metal-seated Control Valve

640A/640B Absolute Pressure Controller for Closed-Loop Electronic Pressure Control

641A/641B Gage Pressure Controller for Closed-Loop Electronic Pressure Control

649A/649B Compact Pressure Controller with Integral Baratron® Capacitance Manometer and Mass Flow Meter

Dual-Zone Pressure Controller (DPC)

πPC PC90 Integrated Pressure Controller

πPC PC99 Integrated Pressure Controller with Mass Flow Meter

Helium Wafer Cooling

640A/640B Absolute Pressure Controller for Closed-Loop Electronic Pressure Control

649A/649B Compact Pressure Controller with Integral Baratron® Capacitance Manometer and Mass Flow Meter

Dual-Zone Pressure Controller (DPC)

Pressure/Vacuum Switches

Power Supplies, Readouts & Accessories for Pressure/Vacuum Control Products

1651C Displayless Digital Pressure Controller Cables and Accessories

246, 247 Power Supply/Display Cables

430E Baratron® Manometer Accessories

220DA/220DD Baratron® Manometer Cables and Accessories

221 Baratron® Manometer Cables and Accessories

Related: Calibration of Pressure/Vacuum Control Products

Related Products: Stainless Steel Vacuum Isolation Valves

Pressure/Vacuum Measurement

Baratron® Direct (Gas Independent) Pressure/Vacuum Capacitance Manometers (0.01-155,000 Torr)

Absolute & Gauge Process Measurement (Direct Pressure/Vacuum Measurement)

Analog Communications (Direct, Absolute & Gauge Pressure/Vacuum Measurement)

Ambient Temperature Operation (Direct, Absolute & Gauge, Analog Pressure/Vacuum Measurement)

121A Baratron® Absolute Pressure/Vacuum Transmitter (1 - 25,000 Torr), with Bakeable Sensor and Remote Electronics

230E Baratron® Absolute Pressure/Vacuum Transmitter (10-25,000 Torr) with 4-20 mA Output

622B Baratron® Absolute Capacitance Manometer (1-1000 Torr) with Terminal Strip Electrical Connector

623B Baratron® Absolute Capacitance Manometer (10-1000 Torr) with Trip Relays

626B Baratron® Absolute Capacitance Manometer (0.1-1000 Torr) with 15-Pin D-Subminiature Electrical Connector

722B Baratron® Compact Absolute Capacitance Manometer (1 to 25,000 Torr)

740C High-Pressure Baratron® Gauge Capacitance Manometer (20 - 3000 PSIG)

750C High-Pressure Baratron® Absolute Capacitance Manometer (10 Torr - 3000 PSIA)

R740C High-Pressure Baratron® Gauge Capacitance Transducer with Trip Relays (20 - 3000 PSIG)

R750C High-Pressure Baratron® Absolute Capacitance Transducer with Trip Relays (10 - 3000 PSIG)

870B Micro-Baratron® High Pressure, Ultraclean, Non-Incendive Single-end Pressure Transducers (1000 - 155,000 Torr)

872B Micro-Baratron® High Pressure, Ultraclean, Non-Incendive Flow-through Pressure Transducers (1000 - 155,000 Torr)

Temperature Controlled to 45 degrees C (Direct, Absolute, Analog Pressure/Vacuum Measurement)

624D Baratron® Heated Absolute Capacitance Manometer (1-20,000 Torr) with Trip Relays, Temperature Controlled to 45 degrees C

627D Baratron® Heated Absolute Capacitance Manometer (0.02-20,000 Torr), Temperature Controlled to 45 degrees C

629D Baratron® Heated Absolute Capacitance Manometer (0.02-20,000 Torr) with 9-Pin D-Subminiature Electrical Connector, Temperature Controlled to 45 or 100 degrees C

727A Baratron® Reduced Size, Heated Absolute Capacitance Manometer (1-1000 Torr), Temperature Controlled to 45 degrees C

D24D Baratron® Heated Dual-Range Absolute Capacitance Manometer, (1-1000 Torr), Temperature Controlled to 45 degrees C, with Trip Relays

D27D Baratron® Heated Dual-Range Absolute Capacitance Manometer (1-1000 Torr), Temperature Controlled to 45 degrees C

E27D Baratron® Heated Absolute Etch Manometer (0.1-100 Torr), Temperature Controlled to 45 degrees C

E29D Baratron® Heated Absolute Capacitance Manometer, Etch Sensor (0.02-100 Torr), Temperature Controlled to 45 or 100 degrees C, with 9-pin D-Subminiature Electrical Connector

CV7627D Baratron® Isolation System (0.05 to 1000 Torr) Temperature Controlled to 45 degrees C

Temperature Controlled to 100 degrees C (Direct, Absolute, Analog Pressure/Vacuum Measurement)

625D Baratron® Heated Absolute Capacitance Manometer (1-20,000 Torr) with Trip Relays, Temperature Controlled to 100 degrees C

628D Baratron® Heated Absolute Capacitance Manometer (0.05-20,000 Torr) Temperature Controlled to 100 degrees C

728A Baratron® Reduced Size, Heated Absolute Capacitance Manometer (1-1000 Torr), Temperature Controlled to 100 degrees C

D25D Baratron® Heated Dual-Range Absolute Capacitance Manometer (1-1000 Torr), Temperature Controlled to 100 degrees C, with Trip Relays

D28D Baratron® Heated Dual-Range Absolute Capacitance Manometer (1-1000 Torr), Temperature Controlled to 100 degrees C

E28D Baratron® Heated, Absolute Capacitance Manometer, Etch Sensor (0.05-100 Torr), Temperature Controlled to 100 degrees C

E29D Baratron® Heated Absolute Capacitance Manometer, Etch Sensor (0.02-100 Torr), Temperature Controlled to 45 or 100 degrees C, with 9-pin D-Subminiature Electrical Connector

CV7628D Baratron® Isolation System (0.05 to 1000 Torr) Temperature Controlled to 100 degrees C

Temperature Controlled to Above 100 degrees C (Direct, Absolute, Analog Pressure/Vacuum Measurement)

631C Baratron® Heated Absolute Capacitance Manometers (1-1000 Torr), Temperature controlled to 150 or 200 degrees C

NEMA Compliant (Direct, Absolute, Analog Pressure/Vacuum Measurement)

430E Baratron® Absolute Pressure/Vacuum Transmitter (1-25,000 Torr), with 4-20 mA Output, NEMA4 Housing

220DA Baratron® Absolute Capacitance Manometer (0.1-1000 Torr) NEMA1 housing, Temperature Controlled to 45 degrees C

High Accuracy, Wide Range Systems (Direct, Absolute, Analog Pressure/Vacuum Measurement)

120AA Baratron® High Accuracy Absolute Capacitance Manometer (0.1-1000 Torr) with Integrated Signal Conditioner, Temperature Controlled to 45 degrees C

690A Baratron® Heated, High Accuracy Absolute Capacitance Manometer (0.1-1000 Torr), Temperature Controlled to 45 degrees C

615A Baratron® High Accuracy Absolute Capacitance Manometer (1-20,000 Torr), Bakeable to 400 degrees C

Digital Communications (Direct, Absolute Pressure/Vacuum Measurement)

Ambient Temperature Operation (Direct, Absolute, Digital Pressure/Vacuum Measurement)

i-Baratron® DMB DeviceNet™ Digital, Absolute Capacitance Manometer (1-1000 Torr), Ambient Temperature

Temperature Controlled to 45 degrees C (Direct, Absolute, Digital Pressure/Vacuum Measurement)

i-Baratron® DMB DeviceNet™ Digital, Absolute Capacitance Manometer (0.1-1000 Torr), Temperature Controlled to 45 degrees C

627C e-Baratron® Heated Ethernet-Enabled Absolute Capacitance Manometer (0.1-1000 Torr) Temperature Controlled to 45 degrees C

E27C e-Baratron® Ethernet-Enabled, Heated Absolute Capacitance Manometer, Etch Sensor (0.1-100 Torr), Temperature Controlled to 45 degrees C

Temperature Controlled to 80 or 100 degrees C (Direct, Absolute, Digital Pressure/Vacuum Measuremen

i-Baratron® DMB DeviceNet™ Digital, Absolute Capacitance Manometer (0.1-1000 Torr), Temperature Controlled to 80 degrees C

628C e-Baratron® Ethernet-enabled Heated Absolute Capacitance Manometer (0.1-1000 Torr), Temperature Controlled to 100 degrees C

E28C e-Baratron® Ethernet-Enabled, Heated, Absolute Capacitance Manometer, Etch Sensor (0.05-100 Torr), Temperature Controlled to 100 degrees C

Relay Output (Vacuum/Pressure Switches)

Ambient Temperature Operation (Direct, Absolute, Pressure/Vacuum Switches)

141A Baratron® Absolute Ambient Vacuum Switch (0.1-1000 Torr)

41B Baratron® Single-End Gauge Pressure Switch (10 - 26,000 Torr)

42B Baratron® Flow-Through Gauge Pressure Switch (10 - 26,000 Torr)

51B Baratron® Single-end, Absolute Pressure/Vacuum Switch (10-26,000 Torr)

52B Baratron® Flow-Through Absolute Pressure Switch (10 - 26,000 Torr)

Temperature Controlled to 100 degrees C (Direct, Absolute, Pressure/Vacuum Switches)

142A Baratron® Absolute Heated Vacuum Switch, Temperature Controlled to 100 degrees C (1-1000 Torr)

Differential Process Measurement (Direct Pressure/Vacuum Measurement)

Ambient Temperature Operation (Direct, Differential Pressure/Vacuum Measurement)

226A Baratron® Differential Capacitance Manometer (0.2 - 1000 Torr) with ±15VDC or +24VDC Input Power and Multiple Output Signals

228A Baratron® Differential Capacitance Manometer (0.2 - 1000 Torr) with 2 Trip Points and ±15VDC or +24VDC Input Power

221B Baratron® Differential Capacitance Manometer (10-25,000 Torr) Remote Electronics, Bakeable to 150 degrees C

NEMA1 Compliant (Direct, Differential Pressure/Vacuum Measurement)

220DD Baratron® Differential Capacitance Manometer (0.1-1000 Torr) NEMA1 Housing, Temperature Controlled to 45 degrees C

High Accuracy, Wide Range Systems (Direct, Differential Pressure/Vacuum Measurement)

120AD Baratron® High Accuracy Differential Capacitance Manometer (0.1-1000 Torr) with Integrated Signal Conditioner, Temperature Controlled to 45 degrees C

698A Baratron® Heated, High Accuracy Differential Capacitance Manometer (0.1-1000 Torr), Temperature Controlled to 45 degrees C

616A Baratron® High Accuracy Differential Capacitance Manometer, Bakeable to 400 degrees C (1-20,000 Torr)

Power Supplies, Readouts, and Accessories for Baratron® Pressure/Vacuum Measurement Products

LDM Local Display Module for MKS 700 and 800 Series Baratron® Pressure/Vacuum Transducers

4-20 mA Output Module for Baratron® Capacitance Manometers

660B Single-channel Digital Power Supply and Readout

PDR2000A Two-Channel Digital Power Supply/Readout

PR4000B Digital Power Supply and Readout

PR4000 Cables and Accessories

670B Signal Conditioner/Display/Power Supply

Test Diagnostic Boards

274B Three-Channel Sensor Multiplexor

120AA/120AD Cables, Power Supplies and Accessories

600-Series Baratron® Cables

722 Cables

870/872 Cables

SRG-3 Spinning Rotor Gauge System

121A Baratron® Cables

Contact MKS Application Engineering for accessories.

Calibration for Baratron® Pressure/Vacuum Capacitance Manometers

HPS® Vacuum Transducers, Gauges, Sensors and Controllers (1x10^-11 to 1500 Torr)

Above Atmosphere (> 760 Torr) To Medium Vacuum Transducers (1.0x10^-5 to 760 Torr)

901P MicroPirani/Piezo Loadlock Vacuum Transducer, (1.0x10^-5 to 1000 Torr) with Atmospheric Switching

902 Absolute Piezo Vacuum Transducer (<1 to 1000 Torr)

905 MicroPirani™ Ultra Compact, OEM Vacuum Sensor Kit (1.0x10^-5 Torr to Atmosphere)

925 MicroPirani™ Vacuum Transducer (1.0x10^-5 Torr to Atmosphere)

910 DualTrans™ MicroPirani™/Absolute Piezo Vacuum Transducer (1.0x10^-5 to 1500 Torr)

Medium to Ultra High Vacuum Transducers (3.0x10^-10 to 5X10^-2 Torr)

903 Inverted Magnetron Cold Cathode Vacuum Transducer (3.0x10^-10 to 5.0x10^-3 Torr)

909AR Digital and Analog Hot Cathode Vacuum Transducer (5.0x10^-10 to 5.0x10^-2 Torr)

971 UniMag™ Cold Cathode Vacuum Transducer (1x10^-8 to 5x10^-3 Torr)

SRG-3 Spinning Rotor Gauge System

Atmosphere to Ultra High Vacuum Transducers (5.0x10^-10 to Atmosphere)

972 DualMag™ Cold Cathode/MicroPirani™ Vacuum Transducer (1x10^-8 Torr to Atmosphere)

974 QuadMag™ Cold Cathode/MicroPirani™/Piezo Vacuum Transducer (1x10^-8 to 1500 Torr)

999 Quattro Multi-Sensor Vacuum Transducer ( 5.0x10^-10 Torr to atmosphere) with Atmospheric Switching

979B Atmosphere to Vacuum Transducer (5.0x10^-10 Torr to atmosphere)

Vacuum Sensors

317 Convection-Enhanced Pirani Vacuum Sensors (1.0x10^-3 to 1000 Torr)

431 & 423 I-Mag® Cold Cathode Vacuum Sensors (1.0x10^-11 to 1.0x10^-2 Torr)

345 Pirani Vacuum Sensors (1.0x10^-4 to 100 Torr)

Nude Hot Cathode Ionization Vacuum Sensor (5.0x10^-10 to 1.0x10^-2 Torr)

Mini Ion Gauge (MIG), Hot Cathode Ionization Vacuum Sensor, (5.0x10^-10 to 1.0x10^-2 Torr)

Controllers for Vacuum Gauges & Sensors

PDR900 Vacuum Gauge Controller and Display for Series 900 Transducers

943 Cold Cathode Vacuum Gauge Controller for use with 423 i-Mag® and 421 Vacuum Sensors

945 Pirani Vacuum Gauge Controller for use with 345 Vacuum Sensors

947 Convection-Enhanced Pirani Vacuum Gauge Controller for use with 317 Vacuum Sensors

959 Hot Cathode/Pirani Vacuum Gauge Controller, for use with Nude Tube, MIG, 317, & 345 Vacuum Sensors

937B Digital Combination Vacuum Gauge Controller

Cables, Parts & Accessories for Vacuum Gauge Controllers, Sensors & Transducers

Installation Hardware for Vacuum Gauges and Sensors

NW16 ISO-KF Vacuum Gauge/Sensor Installation Hardware

NW25 ISO-KF Vacuum Gauge/Sensor Installation Hardware

NW40 ISO-KF Vacuum Gauge/Sensor Installation Hardware

1 1/3 inch CF Vacuum Gauge/Sensor Installation Hardware

2 3/4 inch CF Vacuum Gauge/Sensor Installation Hardware

Vacuum Gauge and Sensor Cables & Parts

317 Convection-Enhanced Pirani Sensor Cables and Accessories

345 Pirani Sensor Cables and Accessories

431& 423 I-Mag® Cold Cathode Sensor Parts & Accessories

Mini Ion Parts and Accessories

Nude Tube Cables, Parts, and Accessories

902 Absolute Piezo Vacuum Transducer Parts & Accessories

903 Inverted Magnetron Cold Cathode Vacuum Transducer Parts & Accessories

909AR Transducer Parts & Accessories

970 Series (971, 972, 974) Transducer Parts & Accessories

979B Atmosphere to Vacuum Transducer Parts & Accessories

999 Quattro Transducer Parts & Accessories

900 Series Vacuum Transducer Cables

Vacuum Gauge & Sensor Controller Parts & Accessories

937B Combination Digital Vacuum Gauge Controller Cables, Parts, & Accessories

943 Cold Cathode Controller Cables, Parts, & Accessories

945 Pirani Gauge Controller Cables, Parts & Accessories

947 Convection-Enhanced Pirani Gauge Controller Cables, Parts & Accessories

959 Hot Cathode Controller Cables, Parts & Accessories

PDR900 Vacuum Gauge Controller Cables and Accessories

Pressure/Vacuum Switches

Residual Gas Analysis/Mass Spectrometry

Residual Gas Analyzers (RGA)

Microvision 2 Flexible, Integration-ready Residual Gas Analyzer (RGA)

e-Vision 2 General Purpose Residual Gas Analyzer (RGA)

HPQ3 High Pressure RGA (<1 mTorr)

HPQ3S High Pressure RGAs (<8 mTorr)

RGA Vacuum Process Monitors

Vision 2000-B™ Vacuum Baseline Monitor RGA

Vision 2000-C™ & Vision 2000-E™ RGA for CVD and Etch

Vision 2000-P™ Process Monitor RGA

HPQ3 High Pressure RGA (<1 mTorr)

HPQ3S High Pressure RGAs (<8 mTorr)

RGA Process and Chamber Environment Hardware and Software Monitors

TOOLweb® RGA Process and Chamber Environment Monitor Software

300mm Resist-Torr® Photoresist Detection Monitor RGA

Atmospheric Pressure Residual Gas Analyzers

Cirrus™2 Benchtop Atmospheric RGA System

Cirrus™2 Benchtop Atmospheric RGA System with Multi-stream Inlet

Cirrus™2 Benchtop Atmospheric RGA System with Integrated Optical Sensor for Carbon Monoxide (CO)

Software for RGA, Process, and Chamber Monitoring

Process Eye™ Professional Software Platform for RGA Process Monitoring

EasyView RGA Software Platform

TOOLweb® RGA Process and Chamber Environment Monitor Software

Related Products: FTIR/NDIR Gas Analysis

RF & DC Power

DC Power Generators

Continuous DC Power Generators

Optima® OPT-50, 5kW DC Plasma Generator

Optima® OPT-100, 10 kW DC Plasma Generator

Optima® OPT-200, 20kW DC Plasma Generator

Optima® OPT-400, 40kW DC Plasma Generator

Optima® OPT-600, 60kW DC Plasma Generator

Optima® OPT-800, 80kW DC Plasma Generator

Pulsed DC Power Generators

RPDG-50 5kW Pulsed DC Plasma Generator

RPDG-100 10kW Pulsed DC Plasma Generator

RPDG-200 20kW Pulsed DC Plasma Generator

RF Power Generators

2MHz RF Plasma Generators

NOVA® 2 MHz 2.5kW & 5.0kW RF Plasma Generators

Spectrum® 2MHz, 5.0kW & 11.0kW RF Plasma Generators

13.56MHz RF Plasma Generators

SurePower® Series 13.56 MHz ,3.5 to 13kW RF Plasma Generators

Spectrum® B3013 13.56MHz, 3kW RF Plasma Generator

GHW Series 13.56 MHz, 1.25, 2.5, and 5.0 kW, High-Reliability RF Plasma Generators

elite™ Series 750, 600, & 300 Watt, 13.56 MHz, RF Plasma Generators

40.68 MHz, Extended-Frequency (VHF) RF Generators

GEW3540, 40.68 MHz, 3.5kW RF Plasma Generator

Impedance Matching Networks

13.56MHz Impedance Matching Networks

MWH-100, 13.56MHz, 10kW Impedance Matching Network

MW-3513, 13.56MHz, 3500W Impedance Matching Network

MW-2513, 13.56MHz, 2500W Impedance Matching Network

MWD-25LD, 13.56MHz, 2.5kW Impedance Matching Network

MWH-5, 13.56MHz, 500W Impedance Matching Network

Dual-frequency Impedance Matching Networks

Dual-frequency Impedance Matching Network

RF Amplifiers for MRI

1.5T RF Power Amplifier Systems for MRI

52-S30-64, 18kW Solid-State, Hi-Rel FET designed, Air Cooled MR RF Amplifier with Patented Stability & Linearity Enhancement Technology

3.0T RF Power Amplifier Systems for MRI

52-S26B-127, 35kW, Hybrid, Air Cooled MRI RF Amplifier

52-S40/S41, Solid-State, Hi-Rel FET design, Water Cooled RF Amplifier Systems with Patented Stability & Linearity Enhancement Technology

Sanitary Fittings, Filter Housings, & Heaters

BPE / Sanitary Components & Fittings

Series 25 Clamps

Series 25 Equal Buttweld Crosses

Series 25 Equal Clamp Crosses

Series 25 Reducing Buttweld Crosses

Series 25 Reducing Clamp Crosses

Series 25 45-Degree Elbows

Series 25 90-Degree Elbows

Series 25 Endcaps

Series 25 Automatic Weld Ferrules

Series 25 Short Weld Ferrules

Series 25 Gaskets

Series 25 Concentric Buttweld Reducers

Series 25 Concentric Clamp Reducer

Series 25 Concentric Clamp X Weld Reducers

Series 25 Eccentric Buttweld Reducers

Series 25 Eccentric Clamp Reducer

Series 25 Eccentric Clamp X Weld Reducers

Series 25 Equal Buttweld Tees

Series 25 Equal Clamp Tee

Series 25 Equal Short Clamp Outlet Tees

Series 25 Equal Clamp Outlet Tee

Series 25 Reducing Buttweld Tee

Series 25 Reducing Clamp Tees

Series 25 Reducing Clamp Outlet Tee

Series 25 Reducing Clamp Short Outlet Tees

Series 25 Reducing Short Clamp Outlet Tees

Series 25 Short Outlet Equal Clamp Tee

Series 25 Short Outlet Run Equal Tees

Series 25 Tubing

Filter Housings

Series 26 Sanitary Filter Housings

Filter Housing Heater Jackets

Series 48 Filter Housing Heaters

Traps & Effluent Management

Process Traps

Metal Etch Trap

TEOS Trap

Vapor Sublimation Trap

Process Trap Parts & Accessories

Metal Etch Trap Parts and Accessories

TEOS Trap Parts and Accessories

Vapor Sublimation Trap Parts and Accessories

Nitrogen Barrier & Scrubber Inlet Transition Devices

Scrubber Inlet Transition Kit

Virtual Wall™ Nitrogen Barrier Devices

Vacuum Chambers

Vacuum Components

ButtWeld Vacuum Components & Fittings

Series 23 Buttweld 45-Degree Elbows

Series 23 Buttweld 45-Degree Elbows with Tangents

Series 23 Buttweld 90-Degree Elbows

Series 23 Buttweld 90-Degree Elbows with Tangents

Series 23 ButtWeld Ball Sockets

Series 23 Buttweld Braided Metal Hose

Series 23 Buttweld Crosses

Series 23 Buttweld Endcaps

Series 23 Buttweld Reducers

Series 23 Buttweld Reducing Tees

Series 23 Buttweld Tees

Series 23 Buttweld Tubing

ISO-KF Vacuum Components & Fittings

Series 31 ISO-KF Blank Flanges

Series 31 ISO-KF Weld Flanges

Series 31 ISO-KF Seals

Series 31 ISO-KF to KF Reducers

Series 31 ISO-KF Adapters

Series 31 ISO-KF Clamps

Series 31 ISO-KF Crosses and Tees

Series 31 ISO-KF Elbows and Straight Sections

Series 31 ISO-KF Bellows and Flexible Hose

Series 31 Flangeless Tubing

Series 31 ISO-KF Viewports, Feedthroughs, and Bourdon Gauges

ISO-Universal Vacuum Components & Fittings

Series 76 ISO-Universal Blank Flanges

Series 76 ISO-Universal Weld Flanges

Series 76 ISO-Universal Seals

Series 76 ISO-Universal Clamps, Bolts and Retaining Rings

Series 76 ISO-Universal Reducers

Series 76 ISO-Universal Adapters

Series 76 ISO-Universal Elbows and Straight Sections

Series 76 ISO-Universal Tees and Crosses

Series 76 ISO-Universal Tubing

Series 76 ISO-Universal Flexible Hose and Bellows

Series 76 Accessories

CF UHV Components & Fittings

Series 88 CF Double-sided Flanges

Series 88 CF Single-Sided Flanges

Series 88 Mini 1 1/3 inch CF Weld Stubs

Series 88 CF Half Nipples

Series 88 CF Full Nipples

Series 88 CF Zero Length Reducers

Series 88 CF to ISO/Ball/Tube Adapters

Series 88 VCR Adapters

Series 88 CF Viewports

Series 88 45 and 90 degree CF Elbows

Series 88 CF Tees

Series 88 CF Crosses

Series 88 CF Flexible Hose and Bellows

Series 88 CF Hardware

Related: Heater Jackets for Vacuum Components

Related: Custom Vacuum Fabrication

Related: Sanitary Fittings & Filter Housings

Vacuum Gauges

Valves

Stainless Steel Vacuum Isolation Valves

Unheated Valves

0.25-4.0 inch Unheated Bellows Vacuum Valves

Pneumatic, Unheated Bellows Vacuum Valves

Standard, Pneumatic, Unheated Bellows Vacuum Valves

0.75 inch, Standard, Pneumatic, Unheated Valves

1.0 inch, Standard, Pneumatic, Unheated Valves

1.5 inch, Standard, Pneumatic, Unheated Valves

2.0 inch, Standard, Pneumatic, Unheated Valves

2.5 inch, Standard, Pneumatic, Unheated Valves

3.0 inch, Standard, Pneumatic, Unheated Valves

4.0 inch, Standard, Pneumatic, Unheated Valves

6.0 inch, Standard, Pneumatic, Unheated Valves

Compact, Pneumatic, Unheated Bellows Vacuum Valves

0.25 inch, Compact, Pneumatic, Unheated Valves

0.5 inch, Compact, Pneumatic, Unheated Valves

0.75 inch, Compact, Pneumatic, Unheated Valves

1.0 inch, Compact, Pneumatic, Unheated Valves

Low Profile, Pneumatic, Unheated Bellows Vacuum Valves

1.0 inch, Low-profile, Pneumatic, Unheated Valves

1.5 inch, Low-profile, Pneumatic, Unheated Valves

2.0 inch, Low-profile, Pneumatic, Unheated Valves

Ultra High Vacuum, Pneumatic, Unheated Bellows Vacuum Valves

1.0 inch, Ultra High Vacuum, Pneumatic, Unheated Valves

1.5 inch, Ultra High Vacuum, Pneumatic, Unheated Valves

2-Stage, Pneumatic, Unheated Bellows Vacuum Valves

1.0 inch, 2-stage, Pneumatic, Unheated Valves

1.5 inch, 2-stage, Pneumatic, Unheated Valves

2.0 inch, 2-stage, Pneumatic, Unheated Valves

3.0 inch, 2-stage, Pneumatic, Unheated Valves

4.0 inch, 2-stage, Pneumatic, Unheated Valves

2-Stage, Low-profile, Pneumatic, Unheated Bellows Vacuum Valves

1.0 inch, 2-stage, Low-profile, Pneumatic, Unheated Valves

1.5 inch, 2-stage, Low-profile, Pneumatic, Unheated Valves

2.0 inch, 2-stage, Low-profile, Pneumatic, Unheated Valves

Manual, Unheated Bellows Vacuum Valves

Standard, Manual, Unheated Bellows Vacuum Valves

0.75 inch, Standard, Manual, Unheated Valves

1.0 inch, Standard, Manual, Unheated Valves

1.5 inch, Standard, Manual, Unheated Valves

2.0 inch, Standard, Manual, Unheated Valves

2.5 inch, Standard, Manual, Unheated Valves

3.0 inch, Standard, Manual, Unheated Valves

4.0 inch, Standard, Manual, Unheated Valves

Compact, Manual, Unheated Bellows Vacuum Valves

0.25 inch, Compact, Manual, Unheated Valves

0.5 inch, Compact, Manual, Unheated Valves

0.75 inch, Compact, Manual, Unheated Valves

1.0 inch, Compact, Manual, Unheated Valves

Low Profile, Manual, Unheated Bellows Vacuum Valves

1.0 inch, Low-profile, Manual, Unheated Valves

1.5 inch, Low-profile, Manual, Unheated Valves

2.0 inch, Low-profile, Manual, Unheated Valves

Electromagnetic, Unheated Bellows Vacuum Valves

0.25 inch, Compact, Electromagnetic, Unheated Valves

0.5 inch, Compact, Electromagnetic, Unheated Valves

0.75 inch, Compact, Electromagnetic, Unheated Valves

1.0 inch, Compact, Electromagnetic, Unheated Valves

6.0-12.0 inch (NW160-NW320) High Conductance, High Flow, Bellows Valves

6.0 inch High Conductance, High Flow, Bellows Valves

8.0 inch High Conductance, High Flow, Bellows Valves

10.0 inch High Conductance, High Flow, Bellows Valves

Ball Valves (Unheated)

Manual, Unheated Ball Valves

Pneumatic, Unheated Ball Valves

Heated Valves

Heated Bellows Vacuum Valves

Single-stage Heated Bellows Vacuum Valves

2.0 inch, Single-stage, Heated Valves

3.0 inch, Single-stage, Heated Valves

4.0 inch, Single-stage, Heated Valves

2-stage Heated Bellows Vacuum Valves

2.0 inch, 2-stage, Heated Valves

3.0 inch, 2-stage, Heated Valves

4.0 inch, 2-stage, Heated Valves

Low-profile Heated Bellows Vacuum Valves

1.0 inch, Low-profile, Heated Valves

1.5 inch, Low-profile, Heated Valves

2.0 inch, Low-profile, Heated Valves

Heated Ball Valves

Manual Heated Ball Valves

Pneumatic Heated Ball Valves

Specialty Valves

Check Valves

Series 225 AUTO-SOFT® Flow-actuated Check Valves

Corrosion & Ozone Resistant Compact Vacuum Valves (CRV)

1.5 inch Corrosion Resistant Valve

2.0 inch Corrosion Resistant Valve

In Situ Diagnostic Access Valves

In Situ Diagnostic Access Valve (IDA™ Valve)

Fast-Closing Valves

Rapid Isolation Valve

High Cycle Valves (HCV)

1.0 inch High Cycle Valve

1.5 inch High Cycle Valve

2.0 inch High Cycle Valve

Low-profile, Two-stage, Poppet Valves with Integrated Bypass Valve

Safety Valves

Series 145 VACUUM SENTRY® Safety Valve

Vacuum Valve Parts & Accessories

Manual 150/160/V-100 Single-stage Valve Parts

Pneumatic 150/160/V-100 Single-stage Valve Parts

150/160/V-100 Single Stage Valve Replacement Solenoid Valves

High Flow, High Conductance Valve Parts and Accessories

LoPro Single-Stage Valve Parts and Accessories

IDA Valve Parts and Accessories

LoPro Two-Stage Valve Parts and Accessories

Electromagnetic Compact Vacuum Valve Parts and Accessories

UHV Valve Parts and Accessories

Corrosion & Ozone Resistant Valve Parts and Accessories

CV Compact High Conductance Valve Accessories and Parts

Two-Stage Valve Parts and Accessories

VACUUM SENTRY® Safety Valve Parts and Accessories

Jalapeño Heated Valve Parts & Accessories

Jalapeño LoPro™ Vacuum Valve Replacement Parts

Jalapeño/Jalapeño LoPro™ Replacement Solenoid Valve

Jalapeño/Jalapeño LoPro™ Heated Valve Cables

Related Products: Pendulum & Throttle Pressure Control Valves

Related Products: Upstream Valves & Pressure Control Valves

Related Products: Custom-manufactured Vacuum Isolation Valves

Wafer Analysis

Metrology Products

GLM™-2000 Minority Carrier Lifetime Monitor

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